Sensor Augmented Virtual Reality Based Teleoperation Using Mixed Autonomy

A multimodal teleoperation interface is introduced, featuring an integrated virtual reality (VR) based simulation augmented by sensors and image processing capabilities onboard the remotely operated vehicle. The proposed virtual reality interface fuses an existing VR model with live video feed and prediction states, thereby creating a multimodal control interface. VR addresses the typical limitations of video based teleoperation caused by signal lag and limited field of view, allowing the operator to navigate in a continuous fashion. The vehicle incorporates an onboard computer and a stereo vision system to facilitate obstacle detection. A vehicle adaptation system with a priori risk maps and a real-state tracking system enable temporary autonomous operation of the vehicle for local navigation around obstacles and automatic re-establishment of the vehicle’s teleoperated state. The system provides real time update of the virtual environment based on anomalies encountered by the vehicle. The VR based multimodal teleoperation interface is expected to be more adaptable and intuitive when compared with other interfaces

Yield improvement in chemical mechanical planarization via material removal variation on a surface

Chemical Mechanical Planarization is one of the most required semiconductor processing modules used in fabrication facilities world wide. Among various surface material removal processes, CMP process is primed for its ability to obtain both local and global planarity on a given surface. The model developed by Fu and Chandra et al, calculates the dishing height based on MRR equations. The model provides a way for step by step material removal based on proportionality parameters like interface pressure, table speed and pattern density. The thesis provides a complete chart for developing a control mechanism for CMP process. The thesis bifurcate the approach into Die scale and Wafer Scale. In die scale, a comprehensive control algorithm is developed based on the MRR equations with pressure and velocity as the control parameter. The model establishes a control over the step height uniformity and upper surface uniformity in both uniform pattern density and varying pattern density surfaces. At wafer scale, an analytical model that relates wafer-pad interface pressure and carrier loading is explained and based on that a FEM analysis is carried out to study the impact of non uniform loading on wafer-pad interface. Both the die scale and wafer models, paved way for developing an integrated control flow chart that can have an impact on the wafer surface at both die scale and wafer scales at the same time. Although, a chart or flow map with necessary models and simulations are in place, to put the entire control mechanism work in a realistic environment there are many other requirements. Like a full fledged pixel or zonal controller should be developed and large scale experimental analysis should be performed based on real time data from manufacturing units.</p

Virtual reality based multi-modal teleoperation using mixed autonomy

The thesis presents a multi modal teleoperation interface featuring an integrated virtual reality based simulation aumented by sensors and image processing capabilities onboard the remotely operated vehicle. The virtual reality interface fuses an existing VR model with live video feed and prediction states, thereby creating a multi modal control interface. Virtual reality addresses the typical limitations of video-based teleoperation caused by signal lag and limited field of view thereby allowing the operator to navigate in a continuous fashion. The vehicle incorporates an on-board computer and a stereo vision system to facilitate obstacle detection. A vehicle adaptation system with a priori risk maps and real state tracking system enables temporary autonomous operation of the vehicle for local navigation around obstacles and automatic re-establishment of the vehicle's teleoperated state. As both the vehicle and the operator share absolute autonomy in stages, the operation is referred to as mixed autonomous. Finally, the system provides real time update of the virtual environment based on anomalies encountered by the vehicle. The system effectively balances the autonomy between the human operator and on board vehicle intelligence. The reliability results of individual components along with overall system implementation and the results of the user study helps show that the VR based multi modal teleoperation interface is more adaptable and intuitive when compared to other interfaces.</p

Sensor Augmented Virtual Reality Based Teleoperation Using Mixed Autonomy

A multimodal teleoperation interface is introduced, featuring an integrated virtual reality (VR) based simulation augmented by sensors and image processing capabilities onboard the remotely operated vehicle. The proposed virtual reality interface fuses an existing VR model with live video feed and prediction states, thereby creating a multimodal control interface. VR addresses the typical limitations of video based teleoperation caused by signal lag and limited field of view, allowing the operator to navigate in a continuous fashion. The vehicle incorporates an onboard computer and a stereo vision system to facilitate obstacle detection. A vehicle adaptation system with a priori risk maps and a real-state tracking system enable temporary autonomous operation of the vehicle for local navigation around obstacles and automatic re-establishment of the vehicle’s teleoperated state. The system provides real time update of the virtual environment based on anomalies encountered by the vehicle. The VR based multimodal teleoperation interface is expected to be more adaptable and intuitive when compared with other interfaces.This article is from Journal of Computing and Information Science 9 (2009): 014502, doi:10.1115/1.3086030. Posted with permission.</p